Fully automatic inert gas environment ultra-high quality two-dimensional material transfer system
1. Four axis adjustable substrate loading platform;
2. Heating of substrate carrier platform: room temperature -200 ℃;
3. Support automatic vacuum adsorption of samples to ensure precise fixation of the target sample position during the transfer process; Vacuum pump solenoid valve control, button control for sample adsorption;
4. The sample stage has water cooling function, which can achieve rapid cooling;
5. Electric in-plane rotation module and controller, with a minimum rotation accuracy of 0.005 degrees;
6. Electric sample Z-axis lifting and controller, with a stroke range of 10mm and a minimum stroke accuracy of 0.5um. Movement speed 0.001mm/s~1mm/s;
7. Cantilever electric X/Y precision displacement platform with a stroke range of 25mm;
8. Sample stage electric X/Y precision displacement platform with a stroke range of 25mm;
9. Electric focusing microscope module;
10. Electric lens replacement module;
11. Metallographic microscope: Objective lenses: 5X, 10X, 20X, 50X; 5-megapixel high-sensitivity CMOS sensor;
12. Can work in a glove box environment;
13. Dual station glove box, size not less than length: 1800mm; Depth: 1000mm; Height: 900mm; Under standard conditions, i.e. constant temperature of 20oC, one standard atmospheric pressure, 99.999% inert gas source, and empty box operation, the water oxygen index is less than 1 ppm;
14. Box body: Material: 304 stainless steel, thickness 3mm, inner surface: stainless steel brushed treatment, outer surface: painted, white;
15. Working gases: nitrogen, argon;
16. Large transition cabin size: diameter 360mm, length 600mm; The small transition cabin has a diameter of 150mm and a length of 300mm.
Facing various unstable two-dimensional materials in the air such as sulfur, halogen, black phosphorus, etc