Ultra high quality two-dimensional material transfer system

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1. Microscopic unit: LV-FM manual focusing arm; LV-TT2 three eye tube; LV-UEPI-N Falling Illumination Unit; 5-hole light dark objective lens converter; 5x, 10x bright field objective, 20x, 50x telephoto bright dark field objective; 50W halogen lamp; 5.9 million pixel DS-Fi3 camera; NIS Elements professional image analysis software; Desktop host and 23.8-inch monitor.

2. Substrate stage: XY axis linear ball structure, stroke 25mm, 10um/scale, straightness 3um, parallelism 15um; Rotate the table around the Z-axis for 360 ° coarse adjustment ± 5 ° fine adjustment, and the minimum reading of the micrometer should be less than 0.1 °/scale; The stage has vacuum adsorption and heating functions, with PID control for a maximum temperature of 200 ℃.

3. Glass slide transfer table: XY axis orthogonal thin platform guide rail structure, 13mm stroke, 10um/scale, cursor reading 1um; Z-axis cross roller guide structure, straightness 3um, 10mm stroke, 10um/scale, micrometer 0.5mm/turn; Three axis tilting rotary table, with three degrees of freedom ± 4 ° adjustment for tilting and rotating; Vacuum adsorbable glass slides and small-sized sample transfer operating rods.

4. Two dimensional materials that are air stable, such as graphene and boron nitride, with high-precision positioning and twisting functions added

5. Optional glove box